Hydrogen Gas Generator

Features

1. Clean gas
   Since a solid polymer electrolyte membrane (PEM) is used for the electrolyte, hydrogen gas with a purity of 99.99% or higher can be obtained.
2. Raw material is pure water only
   Hydrogen gas can be supplied onsite anywhere as long as there is a power source and pure water.
3. High safety
   The amount of hydrogen gas staying in the device is small, and many alarm functions are provided.
4. Not applicable to the High Pressure Gas Safety Act
   Since the hydrogen gas pressure is 50 to 300 kPa, it is not subject to the High Pressure Gas Safety Act.
5. Easy operation
   With the push of a switch, hydrogen gas controlled to a constant gas pressure is immediately supplied.
6. SEMI compliant (HGU-24E / HGU-36E)
   HGU-24E / 36E complies with SEMI standards.
7. High-purity type (HGU-100P / HGU-200P)
   Palladium alloy hydrogen separation membrane A modular purifier is built in to supply hydrogen gas with a purity of 99.9999% or higher and a dew point of -70 ° C or lower.

USE

• Hydrogen water

• For cleaning

  Cleaning silicon wafers, liquid crystal substrates, photomask substrates, etc. with hydrogen water in which hydrogen is dissolved in ultrapure water is effective in removing fine particles, preventing reattachment, and preventing oxide film. Compared with the conventional method, this cleaning method can reduce the amount of chemicals used and the amount of ultrapure water used for rinsing, and can reduce cleaning costs and environmental load at the same time.

• • For beverages

    In recent years, there is hydrogen water that is drunk as a health drink. By incorporating the hydrogen unit in the hydrogen water server, hydrogen water can be supplied onsite.

• Burner (oxygen / hydrogen flame)

   

  When hydrogen gas and oxygen gas or air are mixed and burned using a special burner, a thin and stable flame can be obtained at a high temperature of 2800 ° C, and the parts are not sooted and soiled. It is used for various purposes such as attaching a lid to an electronic component and pre-treating ink printing for electronic parts.

   

• Diamond, thin film silicon synthesis

   

  It is used as a hydrogen source for diamond synthesis and thin film silicon synthesis by the microwave plasma CVD method.

   

• Renewable energy, fuel cell supply

   

  A system that uses renewable energy such as solar power and wind power to electrolyze water and supplies the generated hydrogen to fuel cells when needed where power is needed to generate electricity is clean energy that does not generate carbon dioxide. It is attracting attention as a system. Our hydrogen gas generator is used as a system to convert renewable energy into hydrogen. Hydrogen gas is also required for evaluation of fuel cells and is used as the hydrogen source.

   

• For analysis

   

  It is used as a fuel gas and carrier gas for gas chromatography. In particular, it is used as a fuel gas for FID (Flame Ionization Detector). FID detects plasma electrons generated by burning a substance in a hydrogen flame, and is generally used for quantification of hydrocarbon compounds and measurement of air pollution. Our hydrogen gas generators and water electrolysis cells are used as hydrogen sources in this application.

• others

  It is used in various fields such as hydrogen sources for various research, hydrogen sources for various hydrogenation, and hydrogen sources for brilliant burning in a hydrogen atmosphere.